2000 VLSI Technology Short Course Tapa I/II Key Technologies for 130-100nm Generations |
Monday, June 12, 8:30 a.m. Organizers:
Seiichiro Kawamura, Fujitsu Ltd.
8:25 a.m. Introduction
8:30 a.m. Design Issues, Harry Veendrick, Philips Research Labs
10:00 a.m. Break
10:15 a.m. Transistor Technologies:
11:45 p.m. Lunch
1:15 p.m. Lithography, Hiroshi Ohtsuka, ASET/Oki
2:45 p.m. Break
3:00 p.m. Interconnect Bob Havemann, SEMATECH
4:30 p.m. Conclusion |