Session 14-3

A CMOS Readout Circuit for Silicon Resonant Accelerometer with
32-ppb Bias Stability

 

Abstract

This paper describes a fully-differential CMOS readout circuit for silicon micro-resonant accelerometer. Tested with a SOI resonator, the readout chip sustains the oscillation at 110 kHz with a phase noise of -36dBc at 1Hz and a bias stability of 32ppb, which can be translated to an amplitude noise of 1 angstrom/Hz1/2 and stability of 0.22angstrom up to 100 seconds. The chip is fabricated in a 0.35-micron CMOS process and draws 5mA under a 3.3-V supply.