Session 11B-4

Random Telegraph Signal Statistical Analysis using a Very
Large-scale Array TEG with 1M MOSFETs

 

Abstract

We propose advanced TEG which can measure shortly a large number of electrical characteristics or noise characteristics with high accuracy. We analyzed fluctuations of these characteristics statistically using this TEG. We confirmed that frequencies of the Random Telegraph Signal (RTS) appearance and amplitudes of the RTS become larger with the shrinking of the gate size. We did not find a correlation between DC characteristic fluctuations and random noise which is caused by RTS.