Session 3B-4

A Ta₂O₅ Solid-Electrolyte Switch with ImprovedReliability

 

Abstract

We present a novel solid-electrolyte switch (NanoBridge) promising for application to field programmable gate array (FPGA). We replace a former solid electrolyte of Cu2S with Ta2O5, which has a Si-process compatibility, . As a result, we successfully control the turn-on voltage to adapt to CMOS operation. The Ta2O5-NanoBridge exhibits a high reliability of cycling endurance (>1E4) and a stability against EM (>10years at 2.6mA at RT).