2010 Symposium on VLSI Technology                                                                                             Contact Information:

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The following press materials may be downloaded from this site for pre-conference publicity.

 

Selected images from the abstracts are presented in two formats:

-          Word file with images associated with a highlighted paper and the caption (click on the title)

-          JPE file with individual, high-resolution images

 

2.2 “A 0.063 μm2 FinFET SRAM cell demonstration with conventional lithography using a novel integration scheme with aggressively scaled fin and gate pitch,” V.  Basker, et al., IBM Research, GLOBALFOUNDRIES Inc., Toshiba Corp., NEC Electronics & Albany Nano Tech

 

High Resolution Images

                2.2 Figure 1

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                2.2 Figure 6

                2.2 Figure 16

 

2.3 “Gate-all-around Silicon Nanowire 25-Stage CMOS Ring Oscillators with Diameter Down to 3 nm,” Sarunya Bangsaruntip,  et al., IBM T. J. Watson Research Center

 

High Resolution Images

2.3 Figure 1

2.3 Figure 3

 

10.3 “Impact of Thinning and Through Silicon Via Proximity on High-k / Metal Gate First CMOS Performance,” A. Mercha, et al., IMEC, assignee at IMEC from Panasonic, Qualcom & Samsung

 

High Resolution Images

                10.3 Figure 2

                10.3 Figure 3

                10.3 Figure 13

 

12.1 “32nm 3-Bit 32Gb NAND Flash Memory with DPT (Double Patterning Technology) Process for Mass Production,” B.T. Park, et al., Samsung Electronics, Sungkyunkwan University, South Korea

 

High Resolution Images

                12.1 Figure 2

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                12.1 Figure 5.1

                12.1 Figure 5.2

 

12.4  “A Highly Scalable 8-Layer 3D Vertical-Gate (VG) TFT NAND Flash Using Junction-Free Buried Channel BE-SONOS Device,” Hang-Ting Lue, et al., Macronix International

 

High Resolution Images

                12.4 Figure 1

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                12.4 Figure 11

 

Paper 13.2 “A 32nm Low Power RF CMOS SOC Technology Featuring High-k/Metal Gate,” Peter VanDerVoorn, et al., Intel

 

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13.2 Figure 1

13.2 Figure 2

13.2 Table I

 

19.3 “High Performance PRAM Cell Scalable to sub-20nm technology with below 4F2 Cell Size, Extendable to DRAM Applications,” Ik Soo Kim, et al., Samsung Electronics Co., Ltd.

 

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                19.3 Figure 2

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21.1 “World's first monolithic 3D-FPGA with TFT SRAM over 90nm 9 layer Cu CMOS,”

Tatsuya Naito, et al., Toshiba Corp., Covalent Materials Corp., Tier Logic Inc., tei Technology

 

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                21.1 Figure 1

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                21.1 Figure 4a

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22.3 “High Mobility III-V-On-Insulator MOSFETs on Si with ALD-Al2O3 BOX layers,” M. Yokoyama, et al., The University of Tokyo, National Institute of Advanced Industrial Science and Technology & Sumitomo Chemical Co. Ltd.

 

High Resolution Images

                22.3 Figure 1

                22.3 Figure 2

                22.3 Figure 8