Session 5-3
A Fully-integrated Cantilever-based DNA Detection SoC
in a CMOS Bio-MEMS Process
Abstract
| A highly-integrated DNA detection SoC, which includes DNA sensors, readout circuit, MCU, and OOK TX/RX, is implemented in a 0.35µm CMOS Bio-MEMS process. An oscillator-based self-calibrated readout circuit with high sensitivity (2kHz/ohm) is proposed to convert small resistance variation of the piezoresistive cantilever sensor into adequate frequency shift. The measured results reveal that it could detect <0.02% of resistance variation (0.6ohm) and cover detection concentration range of specific DNA from 100pM to 1µM. |