Session 10A-1

3D Approaches for Non-volatile Memories

 

Abstract

The NAND flash market is continuously growing by the successive introduction of innovative devices and applications. To meet the market trend, 3-dimenstional (3D) non-volatile memories (NVMs) are expected to replace the planar one, especially for 10 nm-nodes and beyond. Therefore, the fundamentals and current status of the 3D NAND flash memory are reviewed and future directions are discussed.