Session 10B-1
Optical Charge-Pumping: A Universal Trap Characterization Technique
for Nanoscale Floating Body Devices
| A universal trap characterization technique for nanoscale floating body devices is demonstrated. It overcomes the limits of conventional charge pumping. Exploiting optically generated carriers, the interface trap density, the energy distribution of interface traps, and the bulk region trap density are extracted directly without additional fabrication or the use of extra test patterns. The proposed technique can provide a trap analysis tool for a study of reliability regardless of the device structure, material, or dimension. |