Session 5A-1

Phase Transformation Kinetics
of HfO₂ Polymorphs in Ultra-thin Region

 

Abstract

Thermodynamically non-equilibrium phase transformation in ultra thin HfO2 films was investigated. Amorphous HfO2 is crystallized into stable monoclinic phase via metastable cubic one. It was also demonstrated that the k-value of cubic-HfO2 was ~50. Kinetic analysis according to Mehl-Avrami-Johnson law pointed out the cubic-HfO2 is stable for practical use thanks to the suppression of monoclinic nucleus formation.