2012 VLSI Technology Short Course Program “14nm CMOS Technology & Design Co-Optimization and Emerging Memory Technologies ” Monday, June 11, 2012 Chairs: Mukesh V. Khare, IBM Corp. Masame Hane, Renesas 8:10 a.m. Introduction 8:15 a.m. FinFET – History Fundamentals and Future, T-J King Liu, UC Berkeley 9:25 a.m. FinFET Design Enablement – Foundry Perspective B. Sheu, TSMC 10:35 a.m. Break 10:50 a.m. Heterogeneous CMOS Integration S. Takagi, Univ. of Tokyo 12:00 p.m. Lunch 1:30 p.m. Interconnect Technology (Design, Reliability & RC) M. Angyal, IBM 2:40 p.m. Break 2:55 p.m. Advanced Patterning (Design Perspective) H. Levinson, GLOBALFOUNDRIES 4:05 p.m. Emerging Memory Technology G. H. Koh, Samsung 5:15 p.m. Conclusion