2005 SYMPOSIUM ON VLSI TECHNOLOGY

2005 VLSI Technology Short Course Program

"Technologies for 45nm/32nm Nodes"

Monday, June 13, 2005 (Shunju)


Organizers:

Tohru Mogami, NEC
Robert Chau, Intel
Carlos H. Diaz, TSMC


8:55

Introduction
9:00 Transistor Options for 45nm/32nm and Beyond
H.S. Philip Wong, Stanford University
10:00 Break
10:15 The Future of Planar CMOSFETs
Yuh-Jier Mii, TSMC
11:15 Interconnect Scaling and BEOL Process Technology
Yoshihiro Hayashi, NEC
12:15 Lunch
13:45 New Design and OPC Flow for Manufacturability for 45nm Node and Beyond
Toshiya Kotani, Toshiba
14:45 Break
15:00 Issues and Breakthrough Designs of 45nm/32nm SRAMs
Takayuki Kawahara, Hitachi
16:00 What Is the Next Generation NVM: Extending Flash or a Disruptive Alternative?
Al Fazio, Intel
17:00 Conclusion


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