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Technology Short Courses

Future of Scaling for Logic and Memory

Moore

NanoSheet Transistor as a Replacement of FinFET for Future nodes : Device Advantages & Specific Process Elements
Nicolas Loubet (IBM)

On-die Interconnect challenges and opportunities for future technology nodes
Mauro Kobrinsky (INTEL)

Challenges and prospects of memory scaling
Gwan-Hyeob Koh (Samsung)

Ferroelectric Hafnium Oxide: From Memory to Emerging Applications’
Uwe Schroeder (Namlab)

EUV lithography and its application to logic and memory devices
Tony Yen (ASML)

More Than Moore

Emerging technologies for low cost TSV-free monolithic 3DIC
Dr. Chang-Hong Shen- Research Fellow , Taiwan Semiconductor Research Institute (TSRI)

Insitu BEOL transistors and oxide electronics
Suman Datta

Layer transfer technology for heterogeneous material integration
Dr. Tatsuro Maeda, AIST

Satellite Workshop

Details Soon!