2006 VLSI Technology Technical Program Welcome to the 2006 Symposium on VLSI Technology On behalf of the organizing Committees, it is our pleasure to invite you to attend the 2006 Symposium on VLSI Technology which will be held from June 13-15 in Honolulu, Hawaii. Since its founding in 1982, this symposium has been one of the most prestigious international forums for the latest research and development in VLSI technology. The program committee has worked very hard this year to select 92 excellent contributed papers from 296 submissions and organized them into 23 sessions. We are also delighted to have two distinguished Invited Speakers for the Plenary Session. Dr. Hans Stork of Texas Instruments, will speak on “Balancing SoC Design and Technology Challenges at 45nm” and Professor Hiroshi Ishiguro of Osaka University will present a talk on” Interactive Humanoids and Androids”. In addition, Professor Sugano will be honored during the opening session for his many years of insightful leadership since the beginning of the conference. The conference will also have three Rump Sessions on the evening of June 14 as a means to facilitate informal discussions among researchers. One is a joint session with the Symposium on VLSI Circuits which will address "Power Management- how will it be solved for 32nm and beyond?" The other two sessions will cover specific technology related topics of current interest; 1) 3D Integration 2) Embedded Memories in the 21st Century In addition, there will be a one-day Short Course on Monday June 12 and will cover "Process Technologies for Continued Scaling and Performance”. Six distinguished researchers will discuss various aspects of deeply scaled CMOS technology. The Short Course promises to be an excellent opportunity for experienced as well as new engineers to broaden their technical base. The symposium registration fee covers all of the sessions including the Rump Sessions, coffee breaks, Monday night Reception and the Tuesday night Banquet. Registration for the Short Course is extra. The registration fees and hotel reservation schedules are detailed at the end of the Advance Program. As in past years, we expect a strong participation of top VLSI researchers from both the industry and the academic sectors. We look forward to seeing you at this year’s exciting Symposium in Honolulu. Jason Woo Tohru Mogami Program Chair Program Co-Chair To download a PDF of the Technology Program - click here CONFERENCE SCHEDULE Sunday, June 11 5:00p-7:00p Registration Monday, June 12 8:00a-5:00p Registration 8:30a-5:15p Short Course 7:00p-9:00p Reception Tuesday, June 13 7:30a-5:30p Registration 8:00a-10:00a Session 1 Opening and Plenary Session 10:15a-11:55p Session 2 Advanced High K Metal Gate Stacks Integration Session 3 Advanced Flash Memory 1:30p-3:10p Session 4 Advanced Gate Dielectric Reliability Session 5 Advanced Dynamic Memory 3:25p-5:30p Session 6 Non-Volatile Trapped Charge Memory Session 7 Multi-Gate FETs 7:00p-9:00p Technology Symposium Banquet Wednesday, June 14 7:30a-5:00p Registration 8:30a-10:10a Session 8 Strain Enhanced CMOS I Session 9 High Speed Memory Technology 10:25a-12:05p Session 10 Mobility Enhancement on Process Induced Strain Session 11 Non-Volatile FinFet Flash Memory 1:30p-3:10p Session 12 Advanced FUSI Gates Stacks Session 13 Analog/RF/Mixed-Signal VLSI 3:25p-5:30p Session 14 Advanced Interconnect Technology Session 15 Alternative Non-Volatile Memory 8:00p-10:00p Rump Sessions Thursday, June 15 7:30a-5:00p Registration 8:30a-10:10a Session 16 Strain Enhanced CMOS-II Session 17 Novel Architectures and Process Integration 10:25a-12:05p Session 18 Strain Enhanced High Performance PMOS Devices Session 19 Advanced CMOS Technology 1:30p-3:10p Session 20 Advanced High K Stacks Session 21 Front-End of Line Processing 3:25p-5:05p Session 22 Novel Gate Stacks Engineering and Characterization Session 23 Advanced Source/Drain Engineering